Pall hosts round table discussions and holds two presentations on Thursday 31st October.
9:45 - 11:15 Roundtable Discussions
"Comparison of Effluent Waste Streams :
Silicon Carbide vs Standard Silicon Processing,
Hosted by Jochen Ruth, Pall GmbH
Gerd Heser, Pall Corporation
11:15 Technical Session : Sustainability & Operational Excellence
"Is reclaimed water the better UPW make up source? "
Presented by Gerd Heser, Pall Corporation
Co-author : Jochen Ruth, Pall GmbH
13:45 Technical Session : Ensuring Yield & Reliability
"Impact of UF Prefilters on Polish Loop Filter Cascade Efficiency"
Presented by: Jochen Ruth
SLS Director, Microelectronics Europe, Pall GmbH
Co-author : Gerd Heser
Application Manager UPW & Systems, Pall Corporation
The International Conference on Planarization / CMP Technology
Wednesday, October 16
16:50 - 18:20
Poster Session 1
:"Extending the applicability of a novel cleanliness assessment method for CMP slurries,"
Presented by Jochen Ruth and Oliver Baatz, Pall GmbH