UltraFacility 2024

위치 Renassance Phoenix Glendale Hotel

Phoenix, Arizona, USA

Pall 부스 NA

이벤트 요약

Pall hold two presentations on Thursday 31st October.

11:15 Technical Session : Sutainability & Operational Excellence

"Is reclaimed water the better UPW source? "

13:45 Technical Session : Ensuring Yeild & Reliability

"Impact of UF Prefilters on Polish Loop Filter"

Speakers :

Jochen Ruth, SLS Director, Microelectronics Europ, Pall Gmbh

Gerd Heser, Application Manager UPW & Systems, Pall Corporation

더 Microelectronics 이벤트

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Join us at a location near you to meet our experts and product specialists, and learn out how the latest technical innovations can improve both the efficiency and quality of your processes at all scales.

February 2024

Feb 2024

24 Sat

28 Wed

SPIE. ADVANCED LITHOGRAPHY + PATTERNING

San Jose Convention Center, San Jose

Our scientists will present papers:

Filter start-up study on HDPE membrane point-of-use filter for lithography application

By Toru Umeda

https://spie.org/advanced-lithography/presentation/Filter-start-up-study-on-HDPE-membrane-point-of-use/12957-82#_=

Filtration study with Nylon membrane for metal removal performance improvement

By Hirokazu Sakakibara

https://spie.org/advanced-lithography/presentation/Filtration-study-with-Nylon-membrane-for-metal-removal-performance-improvement/12957-109#_=_

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