특집

Purification & Filtration for IPA

Significant Improvement in Particle Reduction and Metal Removal Efficiency across All Metals

 IonKleenTM  IPA  Purifier

 

 

  • Proprietary post manufacturing cleaning provides lowest nonvolatile organics (NVR)

 

  • Improved metal removal efficiency (MRE)  across all metals

 

  • Greater ion exchange capacity (IEC)

 

  • Faster particle rinse-in in IPA

 

  • Improved particle retention lowers defects on wafer

 

  • Suitable for both room and high temperature IPA

 

  • Lower dP with high area design

New IonKleen IPA Purifier For IPA and Other Solvents

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